Study of the vacuum purity influence on oxygen and nitrogen spectra properties in DC glow discharge

Vacuum

Volumn 76, Issue 4, 2004, Pages 433-436

  Hrachova V ^a   Kylian O ^a   Kanka A ^a  

^a CHARLES UNIVERSITY   (Czech Republic)

Author keywords

DC glow discharge; Emission spectra; Nitrogen; Oxygen; Purity of discharge system

Indexed keywords

COMPOSITION; GLOW DISCHARGES; IMPURITIES; IONIZATION; NITROGEN; OXYGEN; POSITIVE IONS; VACUUM;

DC GLOW DISCHARGES; DISCHARGE SYSTEMS; DISCHARGE VOLUME; PLASMA-WALL INTERACTIONS;

SPECTRUM ANALYSIS;

EID: 8344264620     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.12.164     Document Type: Article

References (4)

1. Hrachová V., Kaňka A. Vacuum. 48:1997;689.
2. Guerra V., Loureiro J. Plasma Sources Sci Technol. 6:1997;373.
3. Guerra V., Loureiro J. Plasma Sources Sci Technol. 6:1997;361.
4. Gordiets B.F., Ferreira C.M., Guerra V., Loureiro J., Nahorny J., Pagnon D., Touzeau M., Vialle M. IEEE Trans Plasma Science. 23:1995;750.