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Volumn 69, Issue , 2012, Pages 24-26
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Lead-free (Na 0.5K 0.5)(Nb 0.95Ta 0.05)O 3-BiFeO 3 thin films for MEMS piezoelectric vibration energy harvesting devices
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Author keywords
Energy harvesting device; Lead free piezoelectric materials; MEMS; Sol gel; Thin films
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Indexed keywords
ENERGY HARVESTING DEVICE;
EXCELLENT PERFORMANCE;
LEAD-FREE;
LEAD-FREE PIEZOELECTRIC MATERIALS;
LEAD-FREE PIEZOELECTRICS;
LOW RESONANCE FREQUENCY;
MAXIMUM POWER;
MEMS PROCESS;
PIEZOELECTRIC VIBRATION;
SMALL CONCENTRATION;
UNIFORM MICROSTRUCTURE;
ENERGY HARVESTING;
GELS;
MEMS;
MICROELECTROMECHANICAL DEVICES;
SODIUM;
SOL-GEL PROCESS;
SOL-GELS;
SOLS;
THIN FILMS;
PIEZOELECTRICITY;
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EID: 83155178578
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matlet.2011.11.069 Document Type: Article |
Times cited : (20)
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References (12)
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