Implantable hybrid chrome silicide temperature sensor for power MEMS devices

Micro and Nano Letters

Volumn 6, Issue 11, 2011, Pages 895-899

  Park, Hyunchul ^a   Kim, Yongdae ^b   Jung, Eun Sang ^a   Kwon, Sejin ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Agency for Defence Development   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOTHERMAL REFORMING; BASE METALS; COLD JUNCTIONS; JUNCTION SIZE; MICRO DEVICES; MICRO-SCALES; POWER MEMS; REFERENCE TEMPERATURE; REFERENCE VALUES; RESISTANCE TEMPERATURE DETECTORS; TEMPERATURE COEFFICIENT OF RESISTANCE; THIN FILM THERMOCOUPLE; THIRD-ORDER;

ELECTROMOTIVE FORCE; HYDROGEN; HYDROGEN PEROXIDE; METHANOL; NICKEL; SILICIDES; TEMPERATURE MEASURING INSTRUMENTS; THERMOCOUPLES;

TEMPERATURE SENSORS;

CHROME SILICIDE; HYDROGEN PEROXIDE; METHANOL; NICKEL; SILICON DERIVATIVE; UNCLASSIFIED DRUG;

ARTICLE; COLD; IMPLANTABLE HYBRID TEMPERATURE SENSOR; IMPLANTABLE NEUROSTIMULATOR; MICROELECTROMECHANICAL SYSTEM; PERFORMANCE; REFERENCE VALUE; SENSOR; TEMPERATURE; TEMPERATURE MEASUREMENT;

EID: 82955219735     PISSN: None     EISSN: 17500443     Source Type: Journal    
DOI: 10.1049/mnl.2011.0431     Document Type: Article

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