AlN-based MEMS devices for vibrational energy harvesting applications

European Solid-State Device Research Conference

Volumn , Issue , 2011, Pages 119-122

  Bertacchini, A ^a   Scorcioni, S ^a   Dondi, D ^a   Larcher, L ^a   Pavan, P ^a   Todaro, M T ^b   Campa, A ^b   Caretto, G ^b   Petroni, S ^c   Passaseo, A ^b   De Vittorio, M ^b,c,d  

^a UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

^b NATIONAL NANOTECHNOLOGY LABORATORY   (Italy)

^c ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

^d UNIVERSITY OF SALENTO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

FUNDAMENTAL RESONANCE FREQUENCY; MEMSDEVICES; OUTPUT POWER; REAL APPLICATIONS; VIBRATIONAL ENERGIES; VOLTAGE GENERATIONS;

ENERGY HARVESTING; EQUIPMENT; THREE DIMENSIONAL;

SOLID STATE DEVICES;

EID: 82955201780     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.2011.6044220     Document Type: Conference Paper

References (6)

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