Electrical and optical properties of Zn-In-Sn-O transparent conducting thin films

Thin Solid Films

Volumn 520, Issue 4, 2011, Pages 1223-1227

  Carreras, Paz ^a   Antony, Aldrin ^a   Rojas, Fredy ^a   Bertomeu, Joan ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Co sputtering; ITO; Transparent conductive oxides; Zinc oxide

Indexed keywords

AMORPHOUS MATRICES; COSPUTTERING; ELECTRICAL AND OPTICAL PROPERTIES; FILM COMPOSITION; HIGH DEPOSITION TEMPERATURE; HIGH TRANSPARENCY; INDIUM CONTENT; INDIUM TIN OXIDE; ITO; ITO FILMS; LOW RESISTIVITY; MORPHOLOGICAL PROPERTIES; MULTICOMPONENT THIN FILMS; NANOMETRIC CRYSTALS; OXIDIZING ATMOSPHERE; POST DEPOSITION ANNEALING; QUATERNARY SYSTEMS; RADIO-FREQUENCY (RF) MAGNETRON; RF POWER; ROOM TEMPERATURE; THIN-FILM SILICON SOLAR CELLS; TRANSPARENT CONDUCTIVE OXIDES; TRANSPARENT ELECTRODE; VISIBLE RANGE; X-RAY DIFFRACTION STUDIES; ZINC CONTENT; ZNO;

AMORPHOUS FILMS; COBALT; CRYSTAL MICROSTRUCTURE; DEPOSITION; ELECTRIC PROPERTIES; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; INDIUM; INDIUM COMPOUNDS; MAGNETRONS; OPTICAL PROPERTIES; OXIDE FILMS; SEMICONDUCTING SILICON COMPOUNDS; THIN FILM TRANSISTORS; THIN FILMS; TIN; TIN OXIDES; VAPOR DEPOSITION; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC; ZINC OXIDE;

CONDUCTIVE FILMS;

EID: 82755197962     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.06.078     Document Type: Conference Paper

References (35)

1. K.J. Saji, M.K. Jayaraj, K. Nomura, T. Kamiya, and H. Hosono J. Electrochem. Soc. 155 2008 H390
2. E. Fortunato, D. Ginley, H. Hosono, and D.C. Paine MRS Bull. 32 2007 242
3. F. Villar, A. Antony, J. Escarré, D. Ibarz, R. Roldán, M. Stella, D. Muñoz, J.M. Asensi, and J. Bertomeu Thin Solid Films 517 2009 3575
4. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono Nature 432 2004 488
5. A. Hu, F. Wu, J. Liu, J. Jiang, R. Ding, X. Li, C. Cheng, Z. Zhu, and X. Huang J. Alloy. Compd. 507 2010 261
6. B. Geng, J. Liu, and C. Wan Sensor. Actuat B 92 2003 81
7. A. Antony, P. Carreras, T. Keitzl, R. Roldán, O. Nos, P.A. Frigeri, and J.M. Asensi J. Bertomeu. Phys. Status Solidi A 207 2010 1577
8. D. Raoufi Taha Raoufi Appl. Surf. Sci. 255 2009 5812
9. T. Prasada Rao, and M.C. Santhosh Kumar J. Alloy. Compd. 506 2010 788
10. N. Bouhssir, S. Abed, E. Tomasella, J. Cellier, A. Mosbah, M.S. Aida, and M. Jacquet Appl. Surf. Sci. 252 2006 5594
11. A. Suzuki, T. Matsushita, N. Wada, Y. Sakamoto, and M. Okuda Jpn. J. Appl. Phys. 35 1996 L56
12. J. Steinhauser, S. Faÿ, N. Oliveira, E. Vallat-Sauvain, and C. Ballif Appl Phys. Lett. 90 2007 142107
13. J.F. Wager, D.A. Keszler, and R.E. Presley Transparent Electronics 2008 Springer New York
14. A.C. Tolcin Mineral commodity summary 2010 United States Geological Survey United States 74
15. J.M. Park, J.J. Kim, H.M. Kim, J.H. Kim, S.W. Ryu, and S.H. Park J. Korean Phys. Soc. 48 2006 1624
16. K. Ellmer, A. Klein, and B. Rech Transparent Conductive Zinc Oxide 2008 Springer Heidelberg
17. A.C. Tolcin Mineral commodity summary 2010 United States Geological Survey United States 184
18. J.W.A. Schüttauf, Y. Komatsu, L.J. Geerligs, Y. Mai, A. Bink, D.A. Spee, and R.E.I. Schropp Proceedings of 23rd European Photovoltaic Solar Energy Conference and Exhibition 2008 1586
19. H. Hosono, N. Kikuchi, N. Ueda, and H. Kawazoe J. Non-Cryst. Solids 198/200 1996 165
20. S. Narushima, M. Orita, M. Hirano, and H. Hosono Phys. Rev. B 66 2002 035203
21. G.S. Heo, Y. Matsumoto, I.G. Gim, J.W. Park, K.Y. Kim, and T.W. Kim Solid State. Commun. 149 2009 1731
22. K.J. Saji, and M.K. Jayaraj Phys. Stat. Sol. a 7 2008 1625
23. H.E. Swanson, R.K. Fuyat, and G.M. Ugrinic National Bureau of Standards, Washington Circ. 539 vol. IV 1955
24. H. McMurdie, M. Morris, E. Evans, B. Paretzkin, W. Wong-Ng, L. Ettlinger, and C. Hubbard Powder Diffr. 1 1986 76
25. D.B. Williams, and C.B. Carter Transmission Electron Microscopy - A Textbook for Materials Science, Second Part Diffraction 1996 Plenum Press New York
26. D.S. Liu, C.C. Wu, and C.T. Lee Jpn. J. Appl. Phys. 44 2005 5119
27. W.F. Wu, and B.S. Chiou Semicond. Sci. Tech. 11 1996 196
28. P. Drude Ann. Phys. 306 1900 566
29. J.I. Pankove 1971 Dover Publications New York 93
30. E. Burstein Phys. Rev. 93 1954 632
31. T.S. Moss Proc. Phys. Soc. B 76 1954 775
32. K.J. Saji, and M.K. Jayaraj Thin Solid Films 516 2008 6002
33. T. Sasabayashi, N. Ito, E. Nishimura, M. Kon, P.K. Song, K. Utsumi, A. Kaijo, and Y. Shigesato Thin Solid Films 445 2003 219
34. M. Orita, H. Ohta, M. Hirano, S. Narushima, and H. Hosono Philos. Mag. B 81 2001 501
35. T. Minami, T. Yamamoto, Y. Toda, and T. Miyata Thin Solid Films 373 2000 189