Large area electron beam physical vapor deposition (EB-PVD) and plasma activated electron beam (EB) evaporation - Status and prospects

Surface and Coatings Technology

Volumn 206, Issue 7, 2011, Pages 1653-1659

  Reinhold, E ^a   Faber, J ^a  

^a Von Ardenne Anlagentechnik GmbH   (Germany)

Author keywords

Back side metallization; EB Mag process; Multi purpose coaters; Plasma activated EB evaporation; Spotless arc; Vario cathode

Indexed keywords

COST-SAVING; EB-MAG PROCESS; ELECTRON BEAM EVAPORATION; ELECTRON BEAM-PHYSICAL VAPOR DEPOSITION; HIGH RATE; HIGH-POWER; IN-LINE; INDUSTRIAL PRODUCTION; KEY COMPONENT; LONG TERM PROCESS; MULTI-PURPOSE; PLASMA GENERATION; PROCESS COMBINATION; ROLL TO ROLL; SPOTLESS ARC; STATUS AND PROSPECT; THIN METAL FOIL; TITANIUM-BASED; VARIO-CATHODE;

COATINGS; ELECTRON BEAMS; ELECTRONS; EVAPORATION; PHASE TRANSITIONS; PHYSICAL VAPOR DEPOSITION; PLASMAS; STRIP METAL; SUBSTRATES; TIN; TITANIUM; VAPORS;

PLASMA DEPOSITION;

EID: 82755197117     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.09.022     Document Type: Article

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