Contactless electromagnetic switched interrogation of micromechanical cantilever resonators

Sensors and Actuators, A: Physical

Volumn 172, Issue 1, 2011, Pages 195-203

  Bau M ^a   Tonoli, E ^a   Ferrari, V ^a   Marioli, D ^a  

^a UNIVERSITY OF BRESCIA   (Italy)

Author keywords

Contactless sensor; Electromagnetic interrogation; Lumped element modeling; MEMS resonators

Indexed keywords

MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; RESONATORS;

CONTACTLESS SENSORS; ELECTROMAGNETIC INTERROGATION; EXCITATION SIGNALS; LUMPED ELEMENT MODEL; MECHANICAL RESONANT FREQUENCIES; MEMS RESONATORS; MICROMECHANICAL CANTILEVERS; SILICON MICROFABRICATION;

MICROMECHANICAL RESONATORS;

EID: 82755189540     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.06.021     Document Type: Article

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