Macroporous silicon hydrogen diffusion layers for micro-fuel cells: From planar to 3D structures

Microelectronic Engineering

Volumn 90, Issue , 2012, Pages 79-82

  Gautier, G ^a   Kouassi, S ^a   Desplobain, S ^a   Ventura, L ^a  

^a UNIVERSITÉ DE TOURS   (France)

Author keywords

MEMS; Micro fuel cell; PEMFC; Porous silicon; Silicon

Indexed keywords

3D STRUCTURE; ACTIVE SURFACES; DEEP REACTIVE ION ETCHING; DIFFUSION LAYERS; HYDROGEN DIFFUSION; MACRO POROUS SILICON; MAXIMUM DENSITY; MICROFUEL CELL; PLANAR PEMFC; POWER DENSITIES; PROTON EXCHANGE MEMBRANES; SILICON SUBSTRATES;

DIFFUSION; ELECTROCHEMICAL ETCHING; HYDROGEN; MEMS; PROTON EXCHANGE MEMBRANE FUEL CELLS (PEMFC); REACTIVE ION ETCHING; SILICON; THREE DIMENSIONAL;

POROUS SILICON;

EID: 82555194167     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.04.003     Document Type: Conference Paper

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