Dynamic maintenance in semiconductor manufacturing using Bayesian networks

IEEE International Conference on Automation Science and Engineering

Volumn , Issue , 2011, Pages 238-243

  Kurz, Daniel ^a   Kaspar, Johannes ^a   Pilz, Jürgen ^a  

^a UNIVERSITY OF KLAGENFURT   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

BAYESIAN NETWORK MODELS; CAUSE-EFFECT; DIAGNOSTIC SYSTEMS; DYNAMIC MAINTENANCES; EQUIPMENT REPAIR; ERROR MESSAGES; EXPECTATION-MAXIMIZATION ALGORITHMS; FLOW CHARTS; MAINTENANCE ENGINEERS; MUTUAL INFORMATIONS; OPTIMAL PRODUCTION; ROOT CAUSE; SELF-LEARNING; SEMICONDUCTOR MANUFACTURING;

ALGORITHMS; DECISION MAKING; DECISION THEORY; EMBEDDED SYSTEMS; ENGINEERS; FLOWCHARTING; GRAPHIC METHODS; MANUFACTURE; REPAIR; SEMICONDUCTOR DEVICE MANUFACTURE;

BAYESIAN NETWORKS;

EID: 82455192501     PISSN: 21618070     EISSN: 21618089     Source Type: Conference Proceeding    
DOI: 10.1109/CASE.2011.6042404     Document Type: Conference Paper

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