Virtual probe: A statistical framework for low-cost silicon characterization of nanoscale integrated circuits

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems

Volumn 30, Issue 12, 2011, Pages 1814-1827

  Zhang, Wangyang ^a   Li, Xin ^a   Liu, Frank ^b   Acar, Emrah ^c   Rutenbar, Rob A ^d   Blanton, Ronald D ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b IBM AUSTIN RESEARCH LABORATORY   (United States)

^c IBM T J WATSON RESEARCH CENTER   (United States)

^d University of Illinois at Urbana Champaign   (United States)

Author keywords

Characterization; compressed sensing; integrated circuit; process variation

Indexed keywords

COMPRESSED SENSING; INDUSTRIAL MEASUREMENTS; KRIGING PREDICTION; LINEAR PROGRAMMING PROBLEM; MEASUREMENT DATA; NANO SCALE; NANOSCALE MANUFACTURING; NYQUIST RATE; PROCESS VARIATION; SAMPLING FREQUENCIES; SPATIAL FREQUENCY DOMAINS; SPATIAL VARIATIONS; STATISTICAL FRAMEWORK; VIRTUAL PROBES;

IMAGE RECORDING; INTEGRATED CIRCUITS; INTERPOLATION; MEASUREMENTS; NANOTECHNOLOGY; PROBES; SIGNAL RECONSTRUCTION;

CHARACTERIZATION;

EID: 82155181726     PISSN: 02780070     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAD.2011.2164536     Document Type: Article

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