Freeform manufacturing of a microoptical lens array on a steep curved substrate by use of a voice coil fast tool servo

Optics Express

Volumn 19, Issue 24, 2011, Pages 23938-23951

  Scheiding, Sebastian ^a,c   Yi, Allen Y ^b   Gebhardt, Andreas ^a   Li, Lei ^b   Risse, Stefan ^a   Eberhardt, Ramona ^a   Tünnermann, Andreas ^a,c  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b Ohio State University   (United States)

^c FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND CUTTING TOOLS; GEOMETRY; LITHOGRAPHY; MANUFACTURE; THREE DIMENSIONAL;

3-D SPACE; 3D STRUCTURE; 3D SURFACE; BEAM-SHAPING; CUBIC SPLINE; CURVED SUBSTRATES; CUTTING EDGES; DIAMOND TOOL; DIAMOND-TURN; FABRICATION PROCESS; FAST TOOL SERVO; FREEFORM FEATURE; FREEFORM GEOMETRY; FREEFORMS; HIGH FREQUENCY; LENS ARRAY; MICROOPTICAL; NON-IMAGING; NUMERIC DATA; NUMERICAL CONTROL CODE; OPTICAL COMPONENTS; PERFORMANCE EVALUATION; PIECE-WISE; ROTATIONAL SYMMETRIES; SLOPE CHANGE; SUBSTRATE SURFACE; ULTRAPRECISION MACHINING; VOICE COIL;

SUBSTRATES;

ARTICLE; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; FEEDBACK SYSTEM; INSTRUMENTATION; MAGNETISM; OPTICAL INSTRUMENTATION;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; FEEDBACK; LENSES; MAGNETICS; MINIATURIZATION;

EID: 82055186494     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.023938     Document Type: Article

References (17)

1. G. C Shin, I. W. Jung, V. Malyarchuk, J. Z. Song, S. D Wang, H. C. Ko, Y. G. Huang, J. S. Ha, and J. A. Rogers, "Micromechanics and advanced designs for curved photodetector arrays in hemispherical electronic-eye cameras", Small 7, 851-856 (2010).
2. H. C. Ko, M. P. Stoykovich, J. Song, V. Malyarchuk, W. M. Choi, C.-J. Yu, J. B. Geddes, J. Xiao, S. Wang, Y. Huang and J. A. Rogers, "A hemispherical electronic eye camera based on compressible silicon optoelectronics", Nature 454, 748-753 (2008).
3. D. F. Zhu, C. H. Li, X. F. Zeng, and H. G. Jiang, "Tunable-focused microlens arrays on curved surfaces", Appl. Phys. Lett. 16, 081111 (2010).
4. K. H. Jeong, J. Y. Kim, and L. P. Lee, "Biologically inspired artificial compound eyes", Science 312, 557-561 (2006).
5. J. G. Kim, N. Takama, B. J. Kim, and H. Fujita, "Optical- softlithographic technology for patterning on curved surfaces", J. Micromech. Microeng. 19, 055017 (2009).
6. J. R. Nogues and R. L. Howell, "Fabrication of pure silica micro-optics by sol-gel process", Proc. SPIE 1751, 214-24 (1993).
7. S. Scheiding, A. Y. Yi, A. Gebhardt, R. Loose, L. Li, S. Risse, R. Eberhardt and A. Tünnermann, "Diamond milling or turning for the fabrication of micro lens arrays: comparing different diamond machining technologies", Proc. SPIE 7927, 79270N (2011), doi:10.1117/12.874751
8. T. A. Dow, M. H. Miller, and P. J. Falter, "Application of a fast tool servo for diamond turning of non-rotationally symmetric surfaces", Precis. Eng. 13(4), 243-250 (1991).
9. C. F. Cheung, T. C. Kwok, S. To, W. B. Lee, X. Q. Jiang, and H. F. Li, "Measurement and characterization of surface quality in fast tool servo machining of optical microstructures", Key Eng. Mater. 381-382, 517-520 (2008).
10. W. Gao, T. Araki, S. Kiyono, Y. Okazaki, and M. Yamanaka, "Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder", Precis. Eng. 27, 289-298 (2003).
11. A. Y. Yi, and L. Li, "Design and fabrication of a microlens array using slow tool servo", Opt. Lett. 30(30), 1707-1709 (2005).
12. L. Li and A. Y. Yi, "Microfabrication on a curved surface using 3D microlens array projection", J. Micromech. Microeng. 19, 105010 (8 pages), (2009).
13. F. Z. Fang, X. D. Zhang, and X. T. Hu, "Cylindrical coordinate machining of optical freeform surfaces", Opt. Express 16(10), 7323-7329 (2008).
14. G. E. Davis, J. W. Roblee, and A. R. Hedges, "Comparison of freeform manufacturing techniques in the production of monolithic lens arrays", Proc. SPIE 7426, 742605(2009), doi:10.1117/12.824451
15. Factory accessory options, Nanotechnology Systems (2011), http://www.nanotechsys.com/accessories/nanotech-450upl-factory-options.
16. L. Li and A. Y. Yi, "Design and fabrication of a freeform prism array for 3D microscopy", J. Opt. Soc. Am. A 27(12), 2613-2620 (2010).
17. R. Steinkopf, A. Gebhardt, S. Scheiding, M. Rohde, O. Stenzel, S. Gliech, V. Giggel, H. Löscher, G. Ullrich, P. Rucks, A. Duparre, S. Risse, R. Eberhardt, and A. Tünnermann, "Metal mirrors with excellent figure and roughness", Proc. SPIE 7102, 71020C (2008), doi:10.1117/12.797702