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Volumn 110, Issue 9, 2011, Pages

Determination of secondary ion mass spectrometry relative sensitivity factors for polar and non-polar ZnO

(7) Laufer, Andreas a Volbers, Niklas a Eisermann, Sebastian a Potzger, Kay b Geburt, Sebastian c Ronning, Carsten c Meyer, Bruno K a

a JUSTUS LIEBIG UNIVERSITY (Germany)

b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

c FRIEDRICH SCHILLER UNIVERSITY JENA (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

A-PLANE; CONVERSION FACTOR; IMPURITY CONCENTRATION; ION IMPLANTED; NON-POLAR; P TYPE ZNO; QUANTITATIVE INFORMATION; RELATIVE SENSITIVITY FACTOR; SURFACE TERMINATION; ZNO; ZNO SUBSTRATE;

CRYSTAL IMPURITIES; ELECTRONIC PROPERTIES; IONS; OPTOELECTRONIC DEVICES; SECONDARY EMISSION; SECONDARY ION MASS SPECTROMETRY; SPECTROMETRY; ZINC;

ZINC OXIDE;

EID: 81355142764 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3660417 Document Type: Article

Times cited : (8)

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