Effect of chemical vapor deposition of Si3N4, BN and B4C coatings on the mechanical and dielectric properties of porous Si3N4 ceramic

Scripta Materialia

Volumn 66, Issue 1, 2012, Pages 33-36

  Li, Xiangming ^a   Zhang, Litong ^b   Yin, Xiaowei ^b  

^a NORTHWEST A F UNIVERSITY   (China)

^b NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

Author keywords

B4C; BN; Dielectric properties; Mechanical properties; Si3N4

Indexed keywords

BN; LOW DIELECTRIC CONSTANTS; MECHANICAL AND DIELECTRIC PROPERTIES; POROUS SI;

CERAMIC MATERIALS; COATINGS; DIELECTRIC PROPERTIES; MECHANICAL PROPERTIES; POROUS SILICON; SILICON;

CHEMICAL VAPOR DEPOSITION;

EID: 80755172110     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2011.09.037     Document Type: Article

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