Characterization of gold/gold, gold/ruthenium, and ruthenium/ruthenium ohmic contacts in MEMS switches improved by a novel methodology

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 9, Issue 4, 2010, Pages

  Broué, Adrien ^a,b,c,d   Dhennin, Jérémie ^a   Courtade, Frédéric ^b   Dieppedal, Christel ^e   Pons, Patrick ^b,c,d   Lafontan, Xavier ^a,f   Plana, Robert ^b,c,d  

^a CNES   (France)

^b CNRS   (France)

^c UNIVERSITÉ DE TOULOUSE   (France)

^d INSA   (France)

^e CEA GRENOBLE   (France)

^f INTESENS   (France)

Author keywords

Contact material; Contact temperature; Creep; Gold; Microcontact; Microelectromechanical system; Ruthenium; Switch

Indexed keywords

CHARACTERIZATION; CREEP; MATERIALS PROPERTIES; MECHANICAL PROPERTIES; MEMS; MICROELECTROMECHANICAL DEVICES; OHMIC CONTACTS; RUTHENIUM;

APPLIED CURRENT; CONTACT FORCES; CONTACT INTERFACE; CONTACT MATERIAL; CONTACT PAIR; CONTACT SURFACE; CONTACT TEMPERATURE; CREEP EFFECTS; ELECTRICAL MEASUREMENT; ELECTROMECHANICAL STRESS; ENHANCED STABILITY; EXPERIMENTAL MEASUREMENTS; MEMS SWITCHES; MICRO ELECTRO MECHANICAL SYSTEM; MICRO-CONTACT; MICRO-SCALES; MIXED MATERIALS; NANOINDENTERS; NOVEL METHODOLOGY; POWER INCREASE; TEST VEHICLE; TOPOLOGICAL MODIFICATION;

CONTACTS (FLUID MECHANICS);

EID: 80455124049     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3504663     Document Type: Conference Paper

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