Using focused ion beam for nanosized structure formation in microfluidic chips

Technical Physics Letters

Volumn 37, Issue 10, 2011, Pages 956-959

  Evstrapov, A A ^a,b,c   Mukhin, I S ^a,b,c   Kukhtevich, I V ^a,b,c   Bukatin, A S ^a,b,c  

^a INSTITUTE FOR ANALYTICAL INSTRUMENTATION   (Russian Federation)

^b ITMO UNIVERSITY   (Russian Federation)

^c ST PETERSBURG ACADEMIC UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 80155150219     PISSN: 10637850     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1063785011100191     Document Type: Article

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