Motional impedance analysis: Bridging the Gap in dielectric transduction

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2011, Pages

  Tallur, Siddharth ^a   Cheng, Tiffany J ^a   Sridaran, Suresh ^a   Bhave, Sunil A ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR-GAPS; ANALYTICAL MODEL; DESIGN FREQUENCIES; DISK RESONATOR; MEMS RESONATORS; MOTIONAL IMPEDANCE; MOTIONAL RESISTANCE;

COMPUTER SIMULATION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MODELS; POLYSILICON; RESONATORS; TEMPERATURE CONTROL;

BACTERIOPHAGES;

EID: 80155135902     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FCS.2011.5977791     Document Type: Conference Paper

References (10)

1. S. Pourkamali, G.K. Ho, F. Ayazi, IEEE Transactions on Electron Devices, vol.54, no.8, pp.2024-2030.
2. Y.-W. Lin, S.-S. Li, Z. Ren, C.T.-C. Nguyen, Tech. Digest IEDM 2005, pp. 278-281.
3. T. Cheng and S.A. Bhave, Proc. MEMS 2010, pp. 695-698.
4. M. Akgul, B. Kim, Z. Ren, C.T.-C. Nguyen, Hilton Head, SC, pp.467-470, June 6-10, 2010.
5. D. Weinstein and S.A. Bhave, J. Microelectromech. Syst., 18.6, pp. 1401-1408, 2009.
6. V. Kaajakari, A.T. Alastalo, T. Mattila, IEEE Transactions on UFFC, 53 (12), pp. 2484-89, 2006.
7. L.-W. Hung, Z.A. Jacobson, Z. Ren, A. Javey, C.T.-C. Nguyen, Hilton Head, SC, pp.208-211, June 1-5, 2008.
8. Z. Hao, S. Pourkamali, F. Ayazi, IEEE J. Microelectromech. Syst. 13, pp. 1054-1062, 2004
9. E. Hwang, S.A. Bhave, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 57(7), pp. 1664-1672, 2010.
10. R. Melamud, B. Kim, M. Hopcroft, S. Chandorkar, M. Agarwal, C. Jha, and T. Kenny, Proc. IEEE Int. Conf.MEMS, Kobe, Japan, 2007, pp. 199-202.