Si3N4 with comparable permeability to SiC

Journal of the European Ceramic Society

Volumn 32, Issue 2, 2012, Pages 471-475

  Park, Young Jo ^a   Song, In Hyuck ^a  

^a Korea Institute of Material Science   (South Korea)

Author keywords

A. Shaping; A. Sintering; B. Porosity; D. Si3N4; E. Substrate

Indexed keywords

A. SHAPING; A. SINTERING; B. POROSITY; D. SI3N4; E. SUBSTRATE;

GRANULATION; POROUS SILICON; SILICON CARBIDE; SILICON NITRIDE; SINTERING;

SILICON;

EID: 80055103079     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2011.09.016     Document Type: Article

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