New approach of fabrication and dispensing of micromachined cesium vapor cell

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 7, Issue 3, 2008, Pages

  Nieradko, Lukasz ^a   Gorecki, Christophe ^a   Douahi, Adel ^a   Giordano, Vincent ^a   Beugnot, Jean Charles ^a   Dziuban, Jan ^b   Moraja, Marco ^c  

^a FEMTO ST INSTITUTE   (France)

^b WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^c SAES GETTERS S P A   (Italy)

Author keywords

Anodic bonding; Atomic clock; Cesium dispenser; Microelectromechanical systems

Indexed keywords

CELL MEMBRANES; COMPOSITE MICROMECHANICS; DISPENSERS; HEATING; MEMS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; VAPORS; WAFER BONDING;

ALKALI-VAPOR CELLS; ANODIC BONDING; CAESIUM VAPORS; CELL SURFACES; CESIUM VAPOR; CESIUM VAPOR CELLS; COHERENT POPULATION TRAPPING RESONANCE; GLASS WAFER; HIGH FREQUENCY HF; LOCAL HEATING; MICRO ELECTRO MECHANICAL SYSTEM; MICROMACHINED; MODULATED LASERS; SILICON MICROMACHINING; TEMPERATURE RANGE; VACUUM CAVITY; WAFER-SCALE;

CESIUM;

EID: 80055058166     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2964288     Document Type: Article

References (10)

1. L.-A. Liew, S. Knappe, J. Moreland, H. Robinson, L. Hollberg, and J. Kitching, "Microfabricated alkali vapor cells," Appl. Phys. Lett. 84, 2694-2696 (2004).
2. R. Lutwak, J. Deng, W. Riley, M. Varghese, J. Leblanc, G. Tepolt, M. Mescher, D. K. Serkland, K. M. Geib, and G. M. Peake, "The chipscale atomic clock-Low-power physics package," in Proc. of PTTI, Dec., Washington DC, pp. 339-354 (2004).
3. L.-A. Liew, J. Moreland, and V. Gerginov, "Wafer-level filling of microfabricated atomic vapor cells based on thin-film deposition and photolysis of cesium azide," Appl. Phys. Lett. 90, 114106 (2007).
4. S. Radhakrishnan and A. Lal, "Alkali metal-wax micropackets for chip-scale atomic clocks," in Proc. of Transducers, June, Seoul, pp. 23-26 (2005). (Pubitemid 41538421)
5. S. Knappe, V. Gerginov, P. Schwindt, V. Shah, L. Hollberg, and J. Kitching, "Atomic vapor cells for chip-scale atomic clocks with improved long-term frequency stability," Opt. Lett. 30, 2351-2353 (2005). (Pubitemid 41463485)
6. J. Dziuban, C. Gorecki, V. Giordano, L. Nieradko, H. Maillotte, and M. Moraja, "Procédé de fabrication d'une cellule à gaz active pour l'horloge atomique à gaz ainsi obtenue," French Patent No. 06/09089 (2006).
7. J. Vanier and C. Audoin, The Quantum Physics of Atomic Frequency Standards, Vol. 1, Adam Hilger, Ed., IOP Publishing, Bristol (1989).
8. J. Kitching, S. Knappe, and L. Hollberg, "Miniature vapor-cell atomic frequency references," Appl. Phys. Lett. 81, 553 (2002).
9. C. Boffito, L. Toia, and L. Cattaneo, "Cesium dispensers and process for the use thereof," US Patent No. 6753648.
10. A. Douahi, L. Nieradko, J. C. Beugnot, J. Dziuban, H. Maillote, S. Guérandel, M. Moraja, C. Gorecki, and V. Giordano, "Vapour microcell for chip scale atomic frequency standard," Electron. Lett. 43, 279-280 (2007). (Pubitemid 46363108)