Fabrication of densely patterned micro-arrayed multichannel optical filter mosaic

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 10, Issue 3, 2011, Pages

  Yi, Dingrong ^a   Kong, Linghua ^a  

^a Chuangye Building   (China)

Author keywords

Densely patterned; Microlithography; Multichannel microarrayed filter mosaic; Multispectral imaging; Narrow band optical filters; Thin film physical vapor deposition

Indexed keywords

BIOFILTRATION; DEPOSITION; OPTICAL FILTERS; PHYSICAL VAPOR DEPOSITION; SENSORS; TISSUE;

ADHESIVE FORCE; BAND PASS; BIOLOGICAL PROCESS; BIOLOGICAL STUDIES; COATING MATERIAL; DENSELY PATTERNED; FOCAL PLANE; HANDHELDS; IMAGING SENSORS; METAL OXIDE SEMICONDUCTOR; MINIATURIZED FILTER; MULTI-CHANNEL; MULTIPLE CHANNELS; MULTIPLE EXPOSURE; MULTIPLE IMAGE; MULTISPECTRAL IMAGING; NARROW BAND OPTICAL FILTERS; POST PROCESSING; SPATIAL RESOLUTION; SPECTRAL COMPONENTS; SPECTRAL IMAGING SYSTEM; TECHNICAL DETAILS; TEMPORAL DIMENSIONS;

BANDPASS FILTERS;

EID: 80055030320     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3639188     Document Type: Article

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