CMUT with substrate-embedded springs for non-flexural plate movement

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2010, Pages 1510-1513

  Nikoozadeh, Amin ^a   Khuri Yakub, Pierre T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

capacitive micromachined ultrasonictransducers; CMUT; piston transducer; ultrasound

Indexed keywords

ACOUSTIC PRESSURES; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; CAPACITIVE MICROMACHINED ULTRASONICTRANSDUCERS; CAPACITIVE TRANSDUCERS; CMUT; ELECTRICAL INPUT IMPEDANCE; FABRICATED DEVICE; FABRICATION PROCESS; FILL-FACTOR; FLEXURAL MODES; FRACTIONAL BANDWIDTHS; PEAK DISPLACEMENT; RESONANT BEHAVIOR; SINGLE ELEMENT TRANSDUCERS; SPRING CONSTANTS; SPRING ELEMENT;

ACOUSTIC IMPEDANCE; BANDWIDTH; FABRICATION; MASKS; TRANSDUCERS; ULTRASONIC TRANSDUCERS; ULTRASONICS;

PLATES (STRUCTURAL COMPONENTS);

EID: 80054073886     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2010.5936014     Document Type: Conference Paper

References (3)

1. A. Lohfink and P.-C. Eccardt, "Linear and nonlinear equivalentcircuit modeling of CMUTs," IEEE Trans. Ultrason., Ferroelect., Freq.Contr., vol. 52, no. 12, pp. 2163-2172, 2005.
2. A. S. Ergun, Y. Huang, X. Zhuang, O. Oralkan, G. G. Yaralioglu, and B. T.Khuri-Yakub, "Capacitive micromachined ultrasonic transducers: Fabricationtechnology," IEEE Trans. Ultrason. Ferroelect., Freq. Contr., vol. 52, no.12, pp. 2242-2258, 2005.
3. Y. Huang, A.S. Ergun, E. Haeggstrom, M.H. Badi, and B.T. Khuri-Yakub,"Fabricating capacitive micromachined ultrasonic transducers withwafer-bonding technology," Journal of Microelectromechanical Systems, vol.12, no. 2, pp. 128- 137, Apr 2003.