Multiple replication of thick PDMS micropatterns using surfactants as release agents

Microelectronic Engineering

Volumn 88, Issue 11, 2011, Pages 3275-3277

  Hassanin, H ^a,b   Jiang, K ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

^b HELWAN UNIVERSITY   (Egypt)

Author keywords

PDMS; Release agent; Replica

Indexed keywords

DEMOULDING; DIMENSIONAL PRECISION; LOW CONCENTRATIONS; MICROPATTERNS; PDMS; PDMS REPLICA; RELEASE AGENT; REPLICA; REPLICATION PROCESS; SEPARATION PROCESS; SIMPLE APPROACH;

CERAMIC MATERIALS; MOLDS; SURFACE ACTIVE AGENTS;

MICROCHANNELS;

EID: 80053381467     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.06.027     Document Type: Article

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