Improved scanning geometry to collect 3D-geometry data in flat samples

AIP Conference Proceedings

Volumn 1365, Issue , 2010, Pages 258-260

  Kruger P ^a   Niese, S ^a   Zschech, E ^a   Gelb, J ^b   Feser, M ^b  

^a FRAUNHOFER INSTITUTE FOR NON DESTRUCTIVE TESTING   (Germany)

^b XRADIA INC   (United States)

Author keywords

laminography; X ray microscopy

Indexed keywords

EID: 80053320325     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3625353     Document Type: Conference Paper

References (2)

1. L. Helfen et al., Appl. Phys. Lett. 86, 071915 (2004).
2. A. C. Kak and M. Slaney, Principles of Computerized Tomographic Imaging, New York: IEEE Press, 1988.