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Volumn 1365, Issue , 2010, Pages 65-68
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Developments in the fabrication of zone plates and other nanostructures
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Author keywords
aspect ratio; Diffraction efficiency; electroplating; resolution; RIE
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Indexed keywords
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EID: 80053313426
PISSN: 0094243X
EISSN: 15517616
Source Type: Conference Proceeding
DOI: 10.1063/1.3625305 Document Type: Conference Paper |
Times cited : (5)
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References (0)
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