Anodic alumina MEMS: Applications and devices

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 2000-AB, Issue , 2000, Pages 313-318

  Govyadinov, Alexander ^a   Mardilovich, Peter ^a   Novogradecz, Kathy ^a   Hooker, Stephanie ^a   Routkevitch, Dmitri ^a  

^a Nanomaterials Research Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ASPECT RATIO; COMPOSITE MICROMECHANICS; MICROELECTRONICS; MICROMACHINING;

ANODIC ALUMINA; ANODIC ALUMINA FILM; APPLICATION DEVELOPMENT; APPLICATION ENVIRONMENT; BULK- MICROMACHINING; GAS MICRO SENSORS; MEMS APPLICATIONS; MICRO-MACHINED; SURFACE MICRO-MACHINING; VACUUM MICROELECTRONICS;

ALUMINUM OXIDE;

EID: 80053238845     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2000-1109     Document Type: Conference Paper

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