Performance improvement in amorphous silicon based uncooled microbolometers through pixel design and materials development

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8012, Issue , 2011, Pages

  Ajmera, Sameer ^a   Brady, John ^a   Hanson, Charles ^a   Schimert, Tom ^a   Syllaios, A J ^a   Taylor, Michael ^a  

^a L 3 Communications Electro Optical Systems   (United States)

Author keywords

17 m pixel; Amorphous silicon; Fpa; Infrared; Microbolometer; Uncooled; Wafer level vacuum packaging

Indexed keywords

FORM FACTORS; FPA; HYDROGEN DILUTION; MANUFACTURING FLOW; MATERIAL TEMPERATURE; MATERIALS DEVELOPMENT; MICRO-BOLOMETERS; MICROBOLOMETER; PERFORMANCE IMPROVEMENTS; PIXEL DESIGNS; THERMAL TIME CONSTANTS; THIN FILM MICROSTRUCTURES; THIN-FILM TECHNOLOGY; UNCOOLED; UNCOOLED MICROBOLOMETERS; WAFER LEVEL VACUUM PACKAGING;

AMORPHOUS FILMS; AMORPHOUS MATERIALS; APPROXIMATION THEORY; BOLOMETERS; DESIGN; ELECTRIC PROPERTIES; ELECTRONICS PACKAGING; HYDROGEN; IMPACT RESISTANCE; INFRARED RADIATION; PIXELS; SILICON WAFERS; TECHNOLOGY; TEMPERATURE SENSORS; VACUUM;

AMORPHOUS SILICON;

EID: 80053016045     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.884249     Document Type: Conference Paper

References (4)

1. Hanson, C., Ajmera, S., et. al., "Small pixel a-Si/a-SiGe bolometer focal plane array technology at L-3 Communications, " Proc. SPIE 7660, 7660R, (2010).
2. Stutzmann, M., "Data on hydrogen in a-Si:H from diffusion and effusion studies", in [Amorphous Silicon and its Alloys], Searle, T., ed., EMIS Datareviews Series, No. 19, INSPEC, p.66, (1998).
3. Collins, R., et al., Mat. Res. Soc. Symp. Proc, Vol. 762, A10.1.1, (2003).
4. Ajmera, S., Syllaios, A.J., et al., "Amorphous Silicon Thin-Films for Uncooled Infrared Microbolometer Sensors, " Proc. SPIE 7660, 766012-1, (2010).