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Volumn 314-316, Issue , 2011, Pages 1846-1850
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Experimental research of electrochemical mechanical polishing(ECMP) for Micro tool electrode
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Author keywords
Compound machining; ECMP; Micro tool electrode; Surface quality
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Indexed keywords
ECMP;
ELECTRICAL PARAMETER;
ELECTROCHEMICAL MECHANICAL POLISHING;
EXPERIMENTAL RESEARCH;
MACHINING GAP;
MECHANICAL POLISHING;
MICRO-TOOL;
PROCESS PARAMETERS;
SURFACE QUALITIES;
WORK PIECES;
WORKING FLUID;
DESIGN;
INDUSTRIAL RESEARCH;
MANUFACTURE;
POLISHING;
ELECTROCHEMICAL ELECTRODES;
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EID: 80052976670
PISSN: 10226680
EISSN: None
Source Type: Book Series
DOI: 10.4028/www.scientific.net/AMR.314-316.1846 Document Type: Conference Paper |
Times cited : (1)
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References (3)
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