Formation of two-dimensional photonic crystals by electron-beam lithography

12th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2011 - Proceedings

Volumn , Issue , 2011, Pages 119-121

  Utkin, Dmitry E ^a   Nasimov, Dmitry A ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

lithography; Photonic crystal; Proximity effect

Indexed keywords

PROXIMITY EFFECTS; TWO-DIMENSIONAL PHOTONIC CRYSTALS;

ELECTRON BEAM LITHOGRAPHY; ELECTRON DEVICES; ELECTRONS; LITHOGRAPHY; TWO DIMENSIONAL;

PHOTONIC CRYSTALS;

EID: 80052837465     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EDM.2011.6006911     Document Type: Conference Paper

References (2)

1. E. Yablonovitch, Inhibited spontaneous emission in solid-state physics and electronics, Physical Review Letters, Vol. 58, N. 20, p. 2059-2062.
2. P. Rai Choudury (Ed. ), Handbook of Microlithography, Micromachining and Microfabrication, vol. 1, Ch. 3, SPIE Press Monograph PM39, 1997, p. 1476.