Evidences of anodic-oxidation reset mechanism in TiN\NiO\Ni RRAM cells

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 2011, Pages 24-25

  Goux, L ^a   Degraeve, R ^a   Govoreanu, B ^a   Chou, H Y ^b   Afanas'ev, V V ^b   Meersschaut, J ^a   Toeller, M ^c   Wang, X P ^a   Kubicek, S ^a   Richard, O ^a   Kittl, J A ^a   Wouters, D J ^a,b   Jurczak, M ^a   Altimime, L ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c TOKYO ELECTRON LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

OXIDATION MECHANISMS; PHYSICAL CHARACTERIZATION;

MODELS; TITANIUM NITRIDE;

ANODIC OXIDATION;

EID: 80052671018     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. H. Akinaga and H. Shima, Proc. of the IEEE, 98 (2010);
2. R. Degraeve et al., IEDM (2010);
3. I.H. Inoue et al., Phys. Rev. B 77 (2008);
4. U. Russo et al., IEEE Trans. Elect. Dev. 56 (2009);
5. L. Goux et al., IEEE Trans. Elect. Dev. 56 (2009)