Characterization of a micromachined parylene-based thermal C-shape actuator

Journal of Micromechanics and Microengineering

Volumn 21, Issue 9, 2011, Pages

  Shin, Minchul ^a   Gerratt, Aaron P ^b   Metallo, Cinzia ^c   Brindle, Alex ^a   Kierstead, Brian P ^a   White, Robert D ^a  

^a Tufts University   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c TUFTS UNIVERSITY SCHOOL OF MEDICINE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INPUT CURRENT; INPUT VOLTAGES; LOAD CAPACITY; MATHEMATICAL MODELING; METAL LAYER; MICROMACHINED; MICROMACHINING PROCESS; OPERATION TEMPERATURE; PARYLENE C; TEMPERATURE CHANGES; THIN FILM RESISTORS; TIP DISPLACEMENT;

HEATING; MICROMACHINING;

ACTUATORS;

EID: 80052237551     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/9/095028     Document Type: Article

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