Design and microfabrication of integrated magnetic MEMS energy harvester for low frequency application

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 1855-1858

  Yuan, Quan ^a   Sun, Xuming ^a   Fang, Dong Ming ^b   Zhang, Haixia ^a  

^a PEKING UNIVERSITY   (China)

^b INSTITUTE OF ELECTRONICS   (China)

Author keywords

CoNiMnP; Electrodeposition; Energy Harvester; Low Frequency; Magnetic MEMS

Indexed keywords

CONIMNP; ELECTROMAGNETIC METHODS; ENERGY HARVESTER; IMPLANTABLE DEVICES; LOW FREQUENCY; LOW FREQUENCY PERFORMANCE; MAGNET ARRAY; MAGNETIC MEMS; MANUAL ASSEMBLY; MEMS PROCESS; MICRO ENERGY; MICROFABRICATED; SMALL SIZE;

ACTUATORS; HARVESTERS; IMPLANTS (SURGICAL); INTEGRATION; MAGNETIC FIELDS; MAGNETS; MICROFABRICATION; MICROSYSTEMS; NATURAL FREQUENCIES; SOLID-STATE SENSORS;

ENERGY HARVESTING;

EID: 80052127721     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969845     Document Type: Conference Paper

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