Parylene microprobes with engineered stiffness and shape for improved insertion

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 198-201

  Egert, Daniel ^a   Peterson, Rebecca L ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Microelectrodes; microprobes; neural probes; neural recording; neural stimulation; Parylene; prostheses; stiffener; trench refill

Indexed keywords

MICRO-PROBES; NEURAL PROBES; NEURAL RECORDINGS; NEURAL STIMULATIONS; PARYLENES; STIFFENER; TRENCH REFILL;

ACTUATORS; ELECTROPHYSIOLOGY; MICROELECTRODES; MICROSYSTEMS; PROBES; STIFFNESS; WELL STIMULATION;

SOLID-STATE SENSORS;

EID: 80052113871     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969352     Document Type: Conference Paper

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