Enhanced performance of a CMOS interdigital capacitive humidity sensor by graphene oxide

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 1954-1957

  Zhao, Cheng Long ^a   Qin, Ming ^a   Li, Wei Hua ^a   Huang, Qing An ^a  

^a Southeast University   (China)

Author keywords

Capacitive sensor; graphene oxide; humidity sensor; polyimide

Indexed keywords

AL ELECTRODE; CAPACITIVE HUMIDITY SENSORS; CAPACITIVE SENSOR; CAPACITIVE-TYPE; ENHANCED PERFORMANCE; INTERDIGITAL; SENSING MATERIAL;

ACTUATORS; HUMIDITY SENSORS; MICROSYSTEMS; PASSIVATION; POLYIMIDES; SOLID-STATE SENSORS;

GRAPHENE;

EID: 80052109142     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969243     Document Type: Conference Paper

References (10)

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