Electret based energy harvester using a shared si electrode

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 2634-2637

  Fujii, K ^a   Toyonaga, T ^a,b   Fujita, T ^a,b   Jiang, Y G ^b   Higuchi, K ^b   Maenaka, K ^a,b  

^a UNIVERSITY OF HYOGO   (Japan)

^b Maenaka Human Sensing Fusion Project   (Japan)

Author keywords

Electret; Energy harvesting; Si grid electrode

Indexed keywords

BATCH FABRICATION; CHARGE LEAKAGE; COUNTER ELECTRODES; ENERGY HARVESTER; LOAD RESISTANCES; MASS STRUCTURE; SI ELECTRODES; SILICON STRUCTURES;

ACTUATORS; ELECTRETS; HARVESTERS; MICROSYSTEMS; NATURAL FREQUENCIES; SOLID-STATE SENSORS;

ENERGY HARVESTING;

EID: 80052104303     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969871     Document Type: Conference Paper

References (9)

1. Samson D, Kluge M, Becker T, Schmid U 2010 Energy Harvesting for Autonomous Wireless Sensor Nodes in Aircraft Procedia Engineering for Eurosensors XXIV (Linz, Austria, 5-8 September 2010) 4 pages on CD-ROM.
2. Metcheson P D, Yeatman E M, Rao G K, Holmes A S, Green T C 2008 Energy Harvesting From Human and Machine Motion for Wiress Electronic Devices Proceeding of the IEEE, 96 1457-1486
3. Maenaka K 2010 Fusion of MEMS Sensors and Circuits Dig. of Tech. Papers Int. Solid-State Circuits Conf. (San Francisco, USA, 7-11 February 2010) ES-4
4. D. Miki et al., "MEMS ELCTRET GENERATOR WITH ELECROSTATIC LEVITATION," Proc. of PowerMEMS 2009, pp. 169-172
5. T. Toyonaga et al., "Novel Corona Charging Method for Electret Power-Harvester Using Buried Grid-Electrodes," Tech. Dig. of the 5th APCOT 2010, p. 290
6. T. Fujita et al., "Selective Electret Charging Method for Energy Harvesters Using Biased Electrode," Proc. of Eurosensors 2010, B4P-F-3, 4 pages on the CD-ROM
7. Kwang W Oh et al., "A low-temperature bonding technique using spin-on fluorocarbon polymers to assemble microsystems," Proc. of Journal of Micromechanics and Microengineering, Vol. 12,pp. 187-191
8. S. Boisseau et al., "Optimization of an electret-based energy harvester," Smart Materials and Structrues volume 19, 075015 (2010)
9. T. Fujita et al., "Electret Based Energy Harvester by Using Silicon Grid Electrode," Proc. of PowerMEMS 2010, pp. 407-410