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Volumn 50, Issue 8 PART 2, 2011, Pages
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Formation of nanofibers on the surface of diamond-like carbon films by RF oxygen plasma etching
a
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Author keywords
[No Author keywords available]
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Indexed keywords
DC MAGNETRON SPUTTERING;
DIAMOND-LIKE CARBON;
DLC FILM;
ETCHED SURFACE;
FIELD EMISSION SCANNING ELECTRON MICROSCOPES;
FORMATION MECHANISM;
ION-INDUCED GROWTH;
NANO-SIZE;
OXYGEN PLASMA ETCHING;
RF ELECTRODES;
RF PLASMA;
SILICON SUBSTRATES;
SLOW SCANNING;
ANISOTROPIC ETCHING;
CARBON FIBERS;
CHEMICAL VAPOR DEPOSITION;
DIAMOND LIKE CARBON FILMS;
FIBERS;
PLASMA DEPOSITION;
PLASMA ETCHING;
PLASMA THEORY;
SCANNING ELECTRON MICROSCOPY;
WAVE PLASMA INTERACTIONS;
CARBON FILMS;
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EID: 80051955618
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.50.08JF12 Document Type: Conference Paper |
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Times cited : (8)
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References (12)
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