Simulation-based evaluation of the ramp-up behavior of waferfabs

ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings

Volumn 2003-January, Issue , 2003, Pages 111-117

  Sturm, Roland ^a   Dorner, Johann ^a   Reddig, Kevin ^a   Seidelmann, Joachim ^a  

^a FRAUNHOFER INSTITUTE FOR MANUFACTURING ENGINEERING AND AUTOMATION IPA   (Germany)

Author keywords

Capacity planning; Manufacturing automation; Predictive models; Production facilities; Production planning; Pulp manufacturing; Semiconductor device manufacture; Semiconductor device modeling; Steady state; Virtual manufacturing

Indexed keywords

AGILE MANUFACTURING SYSTEMS; COMPUTER SOFTWARE; MANUFACTURE; PRODUCTION CONTROL; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICES;

CAPACITY PLANNING; MANUFACTURING AUTOMATION; PREDICTIVE MODELS; PRODUCTION FACILITY; PRODUCTION PLANNING; PULP MANUFACTURING; STEADY STATE; VIRTUAL MANUFACTURING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 80051915536     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASMC.2003.1194478     Document Type: Conference Paper

References (6)

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3. Kumar Nag, P.: "Yield Forecasting", PhD Dissertation, Carnegie Mellon University, Pittsburgh 1996
4. Keith, C: "Accelerating Time-to-Money for a Semiconductor Wafer Fab Capacity Ramp", MSc Dissertation, MIT Sloan School of Management, 1996
5. Terwiesch, C; Bohn, R.: "Learning and process improvement during production ramp-up", Int. Journal of Production Economics 70 (2001) 1-19
6. Int. Sematech: "Ramp-Up analysis for semiconductor manufacturers", Technical Report 94122642A-XFR, SEMATECH, Austin, TX 1995.