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Volumn 12, Issue PART 1, 2006, Pages
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Achieving reduced cycle times in semiconductor manufacturing via effective control of the P-K equation factors
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Author keywords
Cycle time; DOE; Simulation; Variability; WIP management
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Indexed keywords
DESIGN OF EXPERIMENTS;
COEFFICIENT OF VARIABILITY;
CYCLE TIME;
EQUIPMENT PERFORMANCE IMPROVEMENTS;
SEMICONDUCTOR FACTORIES;
SEMICONDUCTOR MANUFACTURING;
SIMULATION;
VARIABILITY;
WIP MANAGEMENTS;
SEMICONDUCTOR DEVICE MANUFACTURE;
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EID: 79961203078
PISSN: 14746670
EISSN: None
Source Type: Conference Proceeding
DOI: 10.3182/20060517-3-fr-2903.00041 Document Type: Conference Paper |
Times cited : (2)
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References (5)
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