Electrostatic actuation and control of micro robots using a post-processed high-voltage SOI CMOS chip

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn , Issue , 2011, Pages 2509-2512

  Karagozler, Mustafa Emre ^a   Thaker, Anil ^b   Goldstein, Seth C ^c   Ricketts, David S ^a  

^a Electrical and Computer Engineering   (United States)

^b Carnegie Institute of Technology   (United States)

^c Carnegie Mellon University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE COUPLINGS; CARRIER SUBSTRATE; DIGITAL DESIGNS; ELECTROSTATIC ACTUATION; ENERGY EFFICIENT; HIGH VOLTAGE; HIGH-VOLTAGE DRIVERS; HIGH-VOLTAGE OPERATION; HIGH-VOLTAGES; LOW POWER; MICRO ROBOTS; POST PROCESSING; POWER CONVERSION; POWER DELIVERY; SOI CMOS; STATIC POWER CONSUMPTION; SUBMILLIMETERS;

ELECTRIC POWER TRANSMISSION; ELECTRICITY; ELECTRODES; ELECTROSTATIC ACTUATORS; ROBOTS;

ELECTROSTATICS;

EID: 79960888670     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISCAS.2011.5938114     Document Type: Conference Paper

References (5)

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2. J. Doutreloigne, H. De Smet, J. Van den Steen, and G. Van Doorselaer. Low-power high-voltage cmos level-shifters for liquid crystal display drivers. In Microelectronics, 1999. ICM '99. The Eleventh International Conference on, pages 213-216, nov. 2000.
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4. Mustafa Emre Karagozler, Seth C. Goldstein, and J. Robert Reid. Stressdriven mems assembly + electrostatic forces = 1mm diameter robot. In Proceedings of the IEEE International Conference on Intelligent Robots and Systems (IROS '09)., 2009.
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