A very promising piezoelectric property of Ta2O5 thin films. II: Birefringence and piezoelectricity

Journal of Solid State Chemistry

Volumn 184, Issue 8, 2011, Pages 2033-2040

  Audier, M ^a   Chenevier, B ^a   Roussel, H ^a   Vincent, L ^b   Pena A ^c   Lintanf Salaun A ^d  

^a GRENOBLE INSTITUTE OF TECHNOLOGY   (France)

^b MINATEC   (France)

^c LABORATOIRE DE CRISTALLOGRAPHIE   (France)

^d CEA LETI   (France)

Author keywords

Birefringence; Ceramic thin film; Piezoelectricity; Tantalum oxide

Indexed keywords

BIREFRINGENCE; CERAMIC MATERIALS; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; LASER DOPPLER VELOCIMETERS; MICA; MICROSTRUCTURE; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; SCANNING PROBE MICROSCOPY; SILICATE MINERALS; TANTALUM OXIDES;

CERAMIC THIN FILMS; CONVERSE PIEZOELECTRIC EFFECTS; CRYSTALLOGRAPHIC ORIENTATIONS; LASER DOPPLER VIBROMETRY; PIEZOELECTRIC PROPERTY; PIEZOELECTRIC STRAIN; PIEZORESPONSE FORCE MICROSCOPY; THIN FILM MICROSTRUCTURES;

THIN FILMS;

EID: 79960698091     PISSN: 00224596     EISSN: 1095726X     Source Type: Journal    
DOI: 10.1016/j.jssc.2011.06.002     Document Type: Article

References (15)

1. M. Audier, B. Chenevier, H. Roussel, L. Vincent, A. Peña, A. Lintanf Salaün, J. Solid State Chem., Part I in this issue.
2. Th. Hahn (Ed.), International Tables for Crystallography, vol. A, Reidel, Dordrecht, 1983.
3. C. Rembe, R. Kant, and R.S. Muller Proc. SPIE 4400 2001 12737
4. R. Prislan, Laser Doppler Vibrometry and Modal Testing, University of Ljubljana 〈 www.fiz.uni-lj.si 〉, 1 April 2008.
5. S. Shinohora, A. Mochizuki, H. Yoshida, and M. Sumi Appl. Opt. 25 1986 9
6. A. Lintanf-Salaun, A. Mantoux, E. Blanquet, and E. Djurado J. Electrochem. Soc. 156 2009 H311 H315
7. A. Lintanf-Salaun, Dépots par ESD, et al. et caracté risations physico-chimiques de couches d'oxydes á l'échelle nanométrique pour la microélectronique, Thesis, INP-Grenoble, 2008.
8. Q. Fang, J.-Y. Zhang, Z.M. Wang, J.X. Wu, B.J. O'Sullivan, P.K. Hurley, T.L. Leedham, H. Davies, M. Audier, C. Jimenez, J.-P. Senateur, and I.W. Boyd Thin Solid Films 428 2003 242 248
9. D. Damjanovic, in: I. Mayergoyz, G. Bertotti (Eds.), The Science of Hysteresis, vol. 3, Elsevier, 2006.
10. R. Holland IEEE Trans. Sonics Ultrason. SU-14 1967 18
11. T. Yamaguchi, and K. Hamano J. Phys. Soc. Jpn. 50 1981 3956
12. 〈 http://www.asiinstr.com/technical/Dielectric%20Constants.htm 〉; 〈 http://www.clippercontrols.com/443/pages/dielectric-constant- values 〉; 〈 http://physics.info/dielectrics/ 〉.
13. 〈 http://www.el-cat.com/silicon-properties.htm 〉.
14. LT SPICE IV (Simulation Program with Integrated Circuit Emphasis) originally developed at the Electronics Research Laboratory of the University of California, Berkeley, 1975.
15. A. Gruverman, O. Kolosov, J. Hatano, K. Takahashi, and H. Tokumoto J. Vac. Sci. Technol. B 13 1995 1095