Gas sensors based on MEMS structures made of ceramic ZrO2/Y 2O3 material

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8066, Issue , 2011, Pages

  Vasiliev, A A ^a   Lipilin, A S ^b   Mozalev, A M ^c   Lagutin, A S ^a   Pisliakov, A V ^a   Zaretskiy, N P ^a   Samotaev, N N ^a   Sokolov, A V ^a  

^a KURCHATOV INSTITUTE   (Russian Federation)

^b INSTITUTE OF ELECTROPHYSICS   (Russian Federation)

^c BELARUSIAN STATE UNIVERSITY OF INFORMATICS AND RADIOELECTRONICS   (Belarus)

Author keywords

Aluminum oxide; Gas sensors; Harsh applications; MEMS platforms; Zirconium dioxide

Indexed keywords

ALUMINA MEMBRANES; ALUMINUM OXIDES; ENVIRONMENTAL CONDITIONS; HARSH APPLICATIONS; MEMS PLATFORM; MEMS PLATFORMS; MEMS-STRUCTURE; PULSE-HEATING; ZIRCONIUM DIOXIDE;

ACTUATORS; CERAMIC MEMBRANES; CHEMICAL SENSORS; HEATING; SMART SENSORS; YTTRIA STABILIZED ZIRCONIA; ZIRCONIA; ZIRCONIUM;

GAS DETECTORS;

EID: 79960553077     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.887500     Document Type: Conference Paper

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