Silicon micro-fabrication technologies for micro-filters

43rd International Symposium on Microelectronics 2010, IMAPS 2010

Volumn , Issue , 2010, Pages 498-504

  Majeed, Bivragh ^a   De Malsche, Wim ^a,b   Zhang, Lei ^a   Fiorini, Paolo ^a   Tezcan, Deniz Sabuncuoglu ^a   Soussan, Philippe ^a  

^a IMEC   (Belgium)

^b VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

Author keywords

Micro filters; Microfludics; Silicon micro fabrication

Indexed keywords

DEEP REACTIVE ION ETCHING; MICRO FLUIDIC SYSTEM; MICRO-FABRICATION TECHNIQUES; MICRO-FABRICATION TECHNOLOGY; MICRO-FILTERS; MICROFLUDICS; OPTICAL DETECTION SYSTEM; UNIFORMITY OF STRUCTURES;

CHROMATOGRAPHY; ELECTROPHORESIS; FABRICATION; FLUIDICS; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; MICROELECTRONICS; SILICON; WAFER BONDING;

SILICON WAFERS;

EID: 79960395746     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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