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Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2662-2665

Sphincter actuator fabricated with PDMS/SMA bimorph cantilevers

(5) Makino, Eiji a Mineta, Takashi a Mitsunaga, Tomofumi a Kawashima, Takahiro b Shibata, Takayuki b

a HIROSAKI UNIVERSITY (Japan)

b TOYOHASHI UNIVERSITY OF TECHNOLOGY (Japan)

Author keywords

Bimorph; Cantilever; PDMS film; Shape memory alloy film; Sphincter actuator

Indexed keywords

BIMORPH; CANTILEVER; PDMS FILM; SHAPE MEMORY ALLOY; SPHINCTER ACTUATOR;

ACTUATORS; FABRICATION; MICROCHANNELS; SHAPE MEMORY EFFECT; SHAPE OPTIMIZATION; SILICONES; THICK FILMS;

NANOCANTILEVERS;

EID: 79960050785 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2011.02.112 Document Type: Conference Paper

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.