Micro-patterning of a conductive polymer and an insulation polymer using the Parylene lift-off method for electrochromic displays

Journal of Micromechanics and Microengineering

Volumn 21, Issue 7, 2011, Pages

  Takamatsu, Seiichi ^a,b   Takahata, Tomoyuki ^a   Matsumoto, Kiyoshi ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b BEANS Project   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE POLYMER; ELECTROCHROMIC DISPLAYS; INSULATION LAYERS; LIFT-OFF METHODS; MICRO PATTERNING; ORGANIC ELECTRONICS; PARYLENES; PEDOT:PSS; POLY(3 ,4-ETHYLENEDIOXYTHIOPHENE); TRANSVERSE LINES;

ELECTROCHROMIC DEVICES; ELECTROCHROMISM; INSULATION; PHOTOLITHOGRAPHY; PIXELS;

CONDUCTING POLYMERS;

EID: 79960042331     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/7/075021     Document Type: Article

References (17)

1. Argun A, Aubert P, Thomson B, Shwendeman I, Gaupp C, Hwang J, Pinto N, Tanner D, MacDiamid A and Reynolds J 2004 Multicolored electrochromism in polymers: structures and devices Chem. Mater. 16 4401-12
2. Andersson P, Nilsson D, Svensson P, Chen M, Malmstrom A, Remonen T, Kugler T and Berggren M 2002 Active matrix displays based on all-organic electrochemical smart pixels printed on paper Adv. Mater. 14 1460-64 (Pubitemid 35359302)
3. Takamatsu S, Takahata T, Muraki M, Iwase E, Matsumoto K and Shimoyama I 2010 Transparent conductive-polymer strain sensors for touch input sheets of flexible displays J. Micromech. Microeng. 20 075017
4. Macaya D, Nikolou M, Takamatsu S, Mabeck J, Owens R and Malliaras G 2007 Simple glucose sensors with micromolar sensitivity based on organic electrochemical transistors Sensors Actuators B 123 374-48
5. Mitschke U and Bauerle P 2000 The electroluminescence of organic materials J. Mater. Chem. 10 1471-507
6. Kirchmeyer S and Reuter K 2005 Scientific importance properties and growing applications of poly(3,4-ethylenedioxythiophene) J. Mater. Chem. 15 2077-88 (Pubitemid 40850675)
7. Easchner A, Jonas F, Kirchmeyer S, Lovenich W, Koch N, Fehse K, Pfeiffer M, Walzer K and Leo K 2006 High-conductive PEDOT/PSS for ITO substitution in OLEDs Proc. 13th Int. Display Workshop pp 479-80
8. Norrman K, Madsen M, Gevorgyan S and Krebs F 2010 Degradation patterns in water and oxygen of an inverted polymer solar cell J. Am. Chem. Soc. 132 16883-92
9. Defranco J, Schmidt B, Lipson M and Malliaras G 2006 Photolithographic patterning of organic electronic materials Org. Electron. 7 2-28 (Pubitemid 43177695)
10. Sakane Y, Suzuki Y and Kasagi N 2008 The development of a high-performance perfluorinated polymer electret and its application to micro power generation J. Micromech. Microeng. 18 104011
11. Hoshino K, Hasegawa T, Matsumoto K and Shimoyama I 2006 Organic light-emitting diode micro patterned with a silicon convex stamp Sensors Actuators A 128 339-43
12. Atsuta K, Suzuki H and Takeuchi S 2007 A parylene lift-off process with microfluidic channels for selective protein patterning J. Micromech. Microeng. 17 496-500 (Pubitemid 46778461)
13. Illic B and Craighead H 2000 Topographical patterning of chemically sensitive biological materials using a polymer-based dry lift off Biomed. Microdevices 2 317-22
14. Tan C, Seo B, Brooks D, Chandler E and Craighead H 2009 Parylene peel-off array to probe the role of cell-cell interactions in tumour angiogenesis Integr. Biol. 1 587-94
15. Yoshida Y, Yokokawa R, Suzuki H, Atsuta K, Fujita H and Takeuchi S 2006 Biomolecular linear motors confined to move upon micro-patterns on glass J. Micromech. Microeng. 16 1550-4 (Pubitemid 44102302)
16. Takamatsu S, Takahata T, Matsumoto K and Shimoyama I 2010 Patterning PEDOT:PSS with Patylene peel-off method IEE J. Trans. Sensors Micromach. 130 394-400
17. Baetens R, Jelle B and Gustavsen A 2010 Properties, requirements and possibilities of smart windows for dynamic daylight and solar energy control in buildings: a state-of-art review Sol. Energy Mater. Sol. Cells 94 87-105