Fabrication of silicon microring resonator with smooth sidewalls

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 8, Issue 4, 2009, Pages

  Chen, Yao ^a,b   Feng, Junbo ^c   Zhou, Zhiping ^c,d   Yu, Jun ^b   Summers, Christopher J ^e   Citrin, David S ^d,f  

^a GUANGXI UNIVERSITY   (China)

^b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^c PEKING UNIVERSITY   (China)

^d GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^e Georgia Institute of Technology   (United States)

^f GEORGIA TECH LORRAINE   (France)

Author keywords

Fabrication; Microring resonator; Roughness; Waveguide

Indexed keywords

HIGH RESOLUTION ELECTRON MICROSCOPY; INDUCTIVELY COUPLED PLASMA; LITHOGRAPHY; OPTICAL RESONATORS; SCANNING ELECTRON MICROSCOPY;

FABRICATION PROCESS; HIGH-RESOLUTION SCANNING ELECTRON MICROSCOPIES; MASK MATERIALS; MICRORING RESONATOR; PROCESS COMPLEXITY; PROCESS LATITUDES; SIDEWALL ROUGHNESS;

FABRICATION;

EID: 79959798793     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3258487     Document Type: Article

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