Nanofabrication of nickel stamp for replication of polymer multilevel nanolens arrays via modified two-step anodization process

Japanese Journal of Applied Physics

Volumn 50, Issue 6 PART 2, 2011, Pages

  Cha, Kyoung Je ^a   Lee, Bong Kee ^b   Kim, Dong Sung ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b Chonnam National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM SUBSTRATE; ANODIZATIONS; HOT EMBOSSING PROCESS; NANOFABRICATION TECHNIQUES; NANOLENS; POLYMER SUBSTRATE; PROCESSING CONDITION; TWO-STEP ANODIZATION PROCESS;

ALUMINUM; ELECTROCHEMISTRY; ELECTROFORMING; ELECTROMETALLURGY; FABRICATION; NANOTECHNOLOGY; POLYMERS; SUBSTRATES;

NICKEL;

EID: 79959419932     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.50.06GG12     Document Type: Article

References (19)

1. Y. Xia, P. Yang, Y. Sun, Y. Wu, B. Mayers, B. Gates, Y. Yin, F. Kim, and H. Yan: Adv. Mater. 15 (2003) 353.
2. Z. Burton and B. Bhushan: Nano Lett. 5 (2005) 1607.
3. N. Tao, W. Tong, Z. Wang, W. Wang, M. Sui, J. Lv, and K. Lu: J. Mater. Sci. Technol. 19 (2003) 563.
4. A. Gombert, W. Glaubitt, K. Rose, J. Dreibholz, B. Blasi, A. Heinzel, D. Sporn, W. Doll, and V. Wittwer: Thin Solid Films 351 (1999) 73.
5. Z.-Q. Tian, B. Ren, and D.-Y. Wu: J. Phys. Chem. B 106 (2002) 9463.
6. A. I. Teixeira, G. A. Abrams, P. J. Bertics, C. J. Murphy, and P. F. Nealey: J. Cell. Sci. 116 (2003) 1881.
7. F. L. Dickert, O. Hayden, P. Lieberzeit, C. Haderspoeck, R. Bindeus, C. Palfinger, and B. Wirl: Synth. Met. 138 (2003) 65.
8. A. Valsesia, P. Colpo, M. M. Silvan, T. Meziani, G. Ceccone, and F. Rossi: Nano Lett. 4 (2004) 1047.
9. J.-S. Na, B. Gong, G. Scarel, and G. N. Parsons: ACS Nano 3 (2009) 3191.
10. Q. Zeng, J. Cheng, L. Tang, X. Liu, T. Liu, J. Li, and J. Liang: Adv. Funct. Mater. 20 (2010) 3366.
11. H. Y. Koo, D. K. Yi, S. J. Yoo, and D.-Y. Kim: Adv. Mater. 16 (2004) 274.
12. J.-H. Lee: Sens. Actuators B 140 (2009) 319.
13. D. Mijatovic, J. C. T. Eijkel, and A. V. D. Berg: Lab Chip 5 (2005) 492.
14. R. Ostermann, D. Li, Y. Yin, J. T. McCann, and Y. Xia: Nano Lett. 6 (2006) 1297.
15. W. Lee, M.-K. Jin, W.-C. Yoo, and J.-K. Lee: Langmuir 20 (2004) 7665.
16. D. S. Kim, H. S. Lee, J. Lee, S. Kim, K.-H. Lee, W. Moon, and T. H. Kwon: Microsyst. Technol. 13 (2007) 601.
17. S. Shingubara: J. Nanopart. Res. 5 (2003) 17.
18. G. Meng, Y. J. Jung, A. Cao, R. Vajtai, and P. M. Ajayan: Proc. Natl. Acad. Sci. U. S. A. 102 (2005) 7074.
19. T. Hart and A. Watson: Met. Finish. 98 (2000) 388.