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Volumn 109, Issue 10, 2011, Pages

Modulation of flat-band voltage on H-terminated silicon-on-insulator pseudo-metal-oxide-semiconductor field effect transistors by adsorption and reaction events

Author keywords

[No Author keywords available]

Indexed keywords

ACCUMULATION MODES; ACCUMULATION THRESHOLD; ADSORPTION AND REACTIONS; ALKYL MONOLAYERS; AMBIENT ATMOSPHERE; AMBIENT CONDITIONS; FIELD-EFFECT MOBILITIES; FLAT-BAND VOLTAGE; GAS-PHASE REACTIONS; H-TERMINATED SURFACE; HIGH VACUUM; IN-FIELD; MOLECULAR ADSORPTION; N-CHANNEL DEVICES; REVERSIBLE CHANGE; SENSING APPLICATIONS; SILICON ON INSULATOR;

EID: 79958865065     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3583559     Document Type: Conference Paper
Times cited : (9)

References (35)
  • 8
    • 36849046157 scopus 로고    scopus 로고
    • Influence of physisorbed water on the conductivity of hydrogen terminated silicon-on-insulator surfaces
    • DOI 10.1063/1.2822417
    • G. Dubey, G. P. Lopinski, and F. Rosei, Appl. Phys. Lett. 91, 232111 (2007). 10.1063/1.2822417 (Pubitemid 350234456)
    • (2007) Applied Physics Letters , vol.91 , Issue.23 , pp. 232111
    • Dubey, G.1    Lopinski, G.P.2    Rosei, F.3
  • 13
    • 0037598585 scopus 로고    scopus 로고
    • 10.1016/S0038-1101(03)00065-0
    • H. J. Hovel, Solid-State Electron. 47, 1311 (2003). 10.1016/S0038- 1101(03)00065-0
    • (2003) Solid-State Electron. , vol.47 , pp. 1311
    • Hovel, H.J.1
  • 18
    • 79958837496 scopus 로고    scopus 로고
    • On the 150 nm nominally p-doped SOI substrates, Hall effect measurements indicated n-type conduction in the tosilicon layer, a common occurrence for p-type SIMOX wafers that is known to arise from the formation of oxygen related donors at the BOX interface.
    • On the 150 nm nominally p-doped SOI substrates, Hall effect measurements indicated n-type conduction in the top silicon layer, a common occurrence for p-type SIMOX wafers that is known to arise from the formation of oxygen related donors at the BOX interface.
  • 19
    • 79958854392 scopus 로고    scopus 로고
    • When large gate leakage currents were encountered, the samples were discarded. Sidewall leakage from the Si film edge to the substrate was suspected.
    • When large gate leakage currents were encountered, the samples were discarded. Sidewall leakage from the Si film edge to the substrate was suspected.
  • 20
  • 21
    • 33645501007 scopus 로고    scopus 로고
    • 10.1021/la052960a
    • B. J. Eves and G. P. Lopinski, Langmuir 22, 3180 (2006). 10.1021/la052960a
    • (2006) Langmuir , vol.22 , pp. 3180
    • Eves, B.J.1    Lopinski, G.P.2
  • 23
    • 79958785743 scopus 로고    scopus 로고
    • High resolution energy loss spectroscopy spectra of H-terminated samples obtained in the course of this study show no evidence of oxidation after 7 h of exposure to H2O under conditions similar to those for the electrical measurements.
    • High resolution energy loss spectroscopy spectra of H-terminated samples obtained in the course of this study show no evidence of oxidation after 7 h of exposure to H2O under conditions similar to those for the electrical measurements.
  • 24
    • 33750030494 scopus 로고    scopus 로고
    • Large area, dense silicon nanowire array chemical sensors
    • DOI 10.1063/1.2358214
    • A. A. Talin, L. L. Hunter, F. Leonard, and B. Rokad, Appl. Phys. Lett. 89, 153102 (2006). 10.1063/1.2358214 (Pubitemid 44570592)
    • (2006) Applied Physics Letters , vol.89 , Issue.15 , pp. 153102
    • Talin, A.A.1    Hunter, L.L.2    Lonard, F.3    Rokad, B.4
  • 31
    • 0026868367 scopus 로고
    • Morphology of hydrogen-terminated Si(111) and Si(100) surfaces upon etching in HF and buffered-HF solutions
    • DOI 10.1016/0039-6028(92)91363-G
    • P. Dumas, Y. J. Chabal, and P. Jakob, Surf. Sci. 269, 867 (1992). 10.1016/0039-6028(92)91363-G (Pubitemid 23561513)
    • (1992) Surface Science , vol.269 PART 70 , Issue.1-3 PART B , pp. 867-878
    • Dumas, P.1    Chabal, Y.J.2    Jakob, P.3
  • 35
    • 79958800829 scopus 로고    scopus 로고
    • These might be related to impurities in the decene solution or oxygen present in the background pressure of the chamber, in which case the process could be optimized. They might also originate from the generation of a small density of uncapped dangling bonds (mid-gastates) during the chain reaction.
    • These might be related to impurities in the decene solution or oxygen present in the background pressure of the chamber, in which case the process could be optimized. They might also originate from the generation of a small density of uncapped dangling bonds (mid-gap states) during the chain reaction.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.