Micro-fabrication of patterned LSCF thin-film cathodes with gold current collectors

Solid State Ionics

Volumn 192, Issue 1, 2011, Pages 619-626

  Simrick, N J ^a   Kilner, J A ^a   Atkinson, A ^a   Rupp, J L M ^b   Ryll, T M ^b   Bieberle Hutter A ^b   Galinski, H ^b   Gauckler, L J ^b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b ETH ZURICH   (Switzerland)

Author keywords

Cathode; Etching; Fabrication; LSCF; Micro SOFC; Patterned; Polarisation resistance

Indexed keywords

ACTIVE AREA; CATHODE GEOMETRY; COBALT IRON OXIDES; COLUMNAR MICROSTRUCTURES; ELECTRONIC CONDUCTIVITY; ETCH RATES; ETCHING PROCESS; FEATURE SIZES; GOLD CURRENT COLLECTORS; LIFTOFF TECHNIQUE; LOW POROSITY; LSCF; MICRO SOFC; OHMIC DROP; OXYGEN REDUCTION REACTION; PATTERNED; SHADOW MASK; SIDE WALLS; SPUTTER-ETCHING; WET AND DRY;

ACTIVATION ENERGY; CATHODES; COBALT; DEPOSITION; ELECTRIC CURRENT COLLECTORS; ELECTROLYTIC REDUCTION; FABRICATION; GEOMETRY; GOLD DEPOSITS; HYDROCHLORIC ACID; IRON OXIDES; LANTHANUM; LANTHANUM OXIDES; PHOTOLITHOGRAPHY; PLASMA ETCHING; PULSED LASER DEPOSITION; STRONTIUM; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION; WET ETCHING; ZIRCONIA;

DRY ETCHING;

EID: 79958842909     PISSN: 01672738     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssi.2010.03.025     Document Type: Conference Paper

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