The reaction mechanism of the spray Ion Layer Gas Reaction process to deposit In2S3 thin films

Thin Solid Films

Volumn 519, Issue 19, 2011, Pages 6413-6419

  Gledhill, Sophie ^a   Allison, Rebecca ^a   Allsop, Nicholas ^a   Fu, Yanpeng ^a   Kanaki, Elisavet ^a   Sáez Araoz, Rodrigo ^a   Lux Steiner, Martha ^a   Fischer, Christian Herbert ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

Chemical vapour deposition; ILGAR; In2S3; Mass spectrometry; Thin film

Indexed keywords

AEROSOL-ASSISTED CHEMICAL VAPOUR DEPOSITIONS; CHEMICAL VAPOUR DEPOSITION; COMMERCIAL PROCESS; GROWTH MECHANISMS; GROWTH STAGES; ILGAR; ION LAYER GAS REACTION; REACTION MECHANISM; THIN FILM SOLAR CELLS;

CHEMICAL VAPOR DEPOSITION; CHLORINE; DEPOSITS; MASS SPECTROMETRY; QUARTZ; THIN FILMS;

FILM GROWTH;

EID: 79958242993     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.04.131     Document Type: Article

References (25)

1. N.A. Allsop, C.A. Kaufmann, A. Neisser, M. Rusu, A. Hansel, M.C. Lux-Steiner, and C.H. Fischer Thin-Film Compd. Semicond. Photovolt. 865 2005 443
2. N.A. Allsop, A. Schonmann, A. Belaidi, H.J. Muffler, B. Mertesacker, W. Bohne, E. Strub, J. Rohrich, M.C. Lux-Steiner, and C.H. Fischer Thin Solid Films 513 2006 52
3. A. Belaidi, T. Dittrich, D. Kieven, J. Tornow, K. Schwarzburg, M. Kunst, N. Allsop, M.C. Lux-Steiner, and S. Gavrilov Sol. Energy Mater. Sol. Cells 93 2009 1033
4. D. Kieven, T. Dittrich, A. Belaidi, J. Tornow, K. Schwarzburg, N. Allsop, and M. Lux-Steiner Appl. Phys. Lett. 92 2008 153107
5. N. Naghavi, S. Spiering, M. Powalla, and D. Lincot Proceedings of 3rd World Conference on Photovoltaic Energy Conversion A-C 2003 343
6. E.B. Yousfi, B. Weinberger, F. Donsanti, P. Cowache, and D. Lincot Thin Solid Films 387 2001 29
7. S. Buecheler, D. Corica, D. Guettler, A. Chirila, R. Verma, U. Muller, T.P. Niesen, J. Palm, and A.N. Tiwari Thin Solid Films 517 2009 2312
8. S. Ghoshal, N.P. Kushwah, D.P. Dutta, and V.K. Jain Appl. Organomet. Chem. 19 2005 1257
9. D. Hariskos, S. Spiering, and M. Powalla Thin Solid Films 480 2005 99
10. G.A. Horley, M. Chunggaze, P. O'Brien, A.J.P. White, and D.J. Williams J. Chem. Soc., Dalton Trans. 1998 4205
11. B. Brunetti, V. Piacente, and P. Scardala J. Chem. Eng. Data 43 1998 101
12. N.A. Allsop, A. Schonmann, H.J. Muffler, M. Bar, M.C. Lux-Steiner, and C.H. Fischer Prog. Photovoltaics Res. Appl. 13 2005 607
13. W. Bohne, J. Rohrich, and G. Roschert Nucl. Instrum. Methods Phys. Res. Sect. 136 1998 633
14. W.H. Starnes Jr., F. Frantz, and H.T. Chung Polym. Degrad. Stab. 56 1997 103
15. R. Bindal, S. Chatterjee, and R.C. Methrotra J. Indian Chem. Soc. LIII 1976 867
16. G. Carta, F. Benetollo, S. Sitran, G. Rossetto, F. Braga, and P. Zanella Polyhedron 14 1995 1923
17. Y. Buslaev, V.P. Tarasov, S.P. Petrosyants, and G.A. Kirakosyan Sov. J. Coordination Chem. 4 1978 1019
18. D.L. Perry, and S.L. Philips Handbook of Inorganic Compounds 1995 CRC New York
19. R. Lang J. Acoust. Soc. Am. 34 1961 6
20. W.C. Hinds Aerosol Technology 1999 Wiley-Interscience New York
21. S. Gledhill, Ph.D. Thesis, Oxford University, 2002.
22. C. Camus, N.A. Allsop, T. Kohler, M. Kruger, S.E. Gledhill, J. Klaer, J. Rappich, M.C. Lux-Steiner, and C.H. Fischer 33rd IEEE Photovoltaic Specialists Conference 1-4 2008 544
23. E. Kanaki, Thesis, Frei Universität Berlin, 2008.
24. N.A. Fuchs The Mechanics of Aerosols (Oxford) 1964
25. M. Bar, N. Allsop, I. Lauermann, and C.H. Fischer Appl. Phys. Lett. 90 2007