Metrology CT technology and its applications in the precision engineering industry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7522, Issue , 2010, Pages

  Schick, Gerhard ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

Calibration techniques; Dimensional metrology; Nominal actual comparisons; Non destructive testing; Reverse engineering; X ray computed tomography

Indexed keywords

CALIBRATION TECHNIQUES; DIMENSIONAL METROLOGY; NOMINAL-ACTUAL COMPARISONS; NON DESTRUCTIVE TESTING; X-RAY COMPUTED TOMOGRAPHY;

CALIBRATION; INDUSTRIAL APPLICATIONS; INDUSTRY; MEASUREMENTS; MECHANICS; NONDESTRUCTIVE EXAMINATION; PRECISION ENGINEERING; REVERSE ENGINEERING; SCANNING; TOMOGRAPHY; UNITS OF MEASUREMENT; X RAY TUBES; X RAYS;

COMPUTERIZED TOMOGRAPHY;

EID: 79958088298     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.851634     Document Type: Conference Paper

References (2)

1. Dr. H. Lettenbauer / Dr. D. Weiss, "X-ray image acquisition, processing and evaluation for CT-based dimensional metrology", 52nd Internationales Wissenschaftliches Kolloquium, Technische Universität Ilmenau, 10 - 13 September 2007
2. Lettenbauer, H.; Georgi, B.; Weiss, D.; "Means to Verify the Accuracy of CT Systems for Metrology Applications (In the Absence of Established International Standards)"; In: International Symposium on Digital industrial Radiology and Computed Tomography, Lyon 2007.