SnO2 thin film sensor with enhanced response for NO2 gas at lower temperatures

Sensors and Actuators, B: Chemical

Volumn 156, Issue 2, 2011, Pages 743-752

  Sharma, Anjali ^a   Tomar, Monika ^b   Gupta, Vinay ^a  

^a UNIVERSITY OF DELHI   (India)

^b UNIVERSITY OF DELHI   (India)

Author keywords

Gas sensor; NO2 gas; Semiconducting thin film; Sputtering

Indexed keywords

EFFICIENT DETECTION; ELECTRICAL CONDUCTIVITY; GROWTH PRESSURE; LOW OPERATING TEMPERATURE; LOW-POWER CONSUMPTION; METALLIC TIN; OPERATING TEMPERATURE; REACTIVE GAS; RESPONSE CHARACTERISTIC; RF-SPUTTERING; SEMICONDUCTING THIN FILMS; SENSOR RESPONSE; SPUTTERING PRESSURES; THIN FILM SENSORS;

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; ELECTRIC CONDUCTIVITY; FILM GROWTH; NITROGEN OXIDES; PRESSURE EFFECTS; REACTION KINETICS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING FILMS; TEMPERATURE; THIN FILMS; TIN; X RAY DIFFRACTION;

GASES;

EID: 79958082701     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.02.033     Document Type: Article

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