Etching effect of SF 6 plasma on cotton fiber

Applied Mechanics and Materials

Volumn 55-57, Issue , 2011, Pages 1336-1340

  Kamlangkla, K ^a   Hodak, Satreerat K ^a   Paosawatyanyong, Boonchoat ^a,b  

^a CHULALONGKORN UNIVERSITY   (Thailand)

^b Thailand Ministry of Science and Technology   (Thailand)

Author keywords

Cotton fiber; Etching; Mechanical strength; RF plasma

Indexed keywords

ETCHING EFFECT; EXPOSURE-TIME; INDUCTIVELY-COUPLED; MECHANICAL STRENGTH; MORPHOLOGY CHANGES; OPERATING PRESSURE; PLASMA PROCESS; PLASMA TREATMENT; RF PLASMA; WEIGHT LOSS;

COTTON FIBERS; ELECTROMAGNETIC INDUCTION; ETCHING; FIBERS; MECHANICAL ENGINEERING; MORPHOLOGY; PLASMA APPLICATIONS; PLASMA THEORY; SULFUR; SULFUR HEXAFLUORIDE; TENSILE STRENGTH; WAVE PLASMA INTERACTIONS;

COTTON;

COTTON; ETCHING; FIBERS; MECHANICAL ENGINEERING; MECHANICAL PROPERTIES; PLASMA; SULFUR; TENSILE STRENGTH;

EID: 79957777953     PISSN: 16609336     EISSN: 16627482     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/AMM.55-57.1336     Document Type: Conference Paper

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